Etiqueta de registo: 00621cam 22002171 450
001 1831940
003 http://id.bnportugal.gov.pt/bib/porbase/1831940
005 20030607201600.0
010 ## $a0-87909-668-3
035 ## $793602
095 ## $aPTBN00581532
100 ## $a19890926d1979 k y0pory0103 ba
101 0# $aeng
102 ## $aUS
200 1# $aSemiconductor and integrated circuit fabrication techniques
210 ## $aReston$cReston Publishing,$d1979
215 ## $aIX, 209 p.
675 ## $a621.3 (094.5)$vBN$zpor$3292154
700 #1 $aGise,$bPeter E.$31457971
701 01 $aBlanchard,$bRichard$4070$3743629
801 #0 $aPT$bBN$gRPC
977 ## $1ET-04-25$2coop$4UAVSD$6mq1248149$7bc$8coop$9UAVSD$b18427$k0
998 ## $aUAV22-262